LNF @ Michigan is Your Facility for Success

The Lurie Nanofabrication Facility (LNF) is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology. We also encourage researchers from non-traditional disciplines to make use of our processes, such as metal and dielectric coatings, vacuum processes, fabrication of micro and nano components and metrology tools.

 

Capabilities

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  Overview Technologies Equipment The LNF is a micro and nanofabrication facility.  Our primary fabrication technologies evolve from microchip fabrication.  These technologies have been tailored or modified to produce mechanical and optical devices in addition to electronics. … [Read More...]

Getting Access

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Here is how to get access to the LNF and start working! The procedures and forms are slightly different for different types of lab users, so please select below what best represents you: Internal lab user: from the University of Michigan. Please see the current academic user fee … [Read More...]